ACHILLES CORPORATION [Achilles]

 

PRODUCTS

Wafer Handling System

Black Inner foam: Conductive Type/PESD
Conductive single-layer foam

PESD foam is a conductive independent foam cushion with low outgassing that uses a special foaming technology that does not use chemical foaming agents.

Features

  • Low contamination( Independent foaming)
  • Low out gassing and Low out ion contamination
  • Good impact absorption
  • Stable conductive performance closed-cell foam.

Specification

Model number
MA-□PESD-1/3/5/10(□:diameter)(1/3/5/10:thickness)
Material
Conductive PE
Surface resistance value
R < 1.0×109Ω

Physical property

Item measured value
Resistance(23℃ 60%RH 1.0×106 Ω
Charging potential 0-5 V
Decay time
(5kV→0V)
0.01 sec.
Particle APC(0.5um<) 26 counts/pc
Outgassing 0.08 mg/g
Ion contamination 【anion】(ppb) Cl: ND
NO3:ND
SO4:ND
Ion contamination 【cation】(ppb) Na:ND
K:ND

*This data is an actual measurement value, not a guaranteed value

Resistance comparison

Sample Measurement environment
23℃×60%RH
PESD 6.1×106

PE Cushion

(Competitor A)

2.7×1010

PU Cushion

(Competitor B)

4.8×109<

*This data is an actual measurement value, not a guaranteed value

Triboelectric charging voltage, decay time comparison

Sample Triboelectric charging voltage(V) Decay Time (sec.)
+5kv→+0V -5kv→-0V
PESD 0-5 0.01 0.01

PE Cushion

(Competitor A)

14 – 63 0.19-0.22 0.19-0.22

PU Cushion

(Competitor B)

5 – 7 0.21-0.24 0.21-0.24

*This data is an actual measurement value, not a guaranteed value

Particle comparison APC

Sample 0.3um≦ 0.5um≦ 1um≦ 3um≦ 5um≦ 10um≦

PESD

(size. 8inch)

619 412 266 156 99 30

PE Cushion

(Competitor A)

1,111 786 496 257 189 69

PU Cushion

(Competitor B)

67,959 49,003 28,445 14,533 10,999 3,357

*This data is an actual measurement value, not a guaranteed value

Ion contamination comparison

Sample Anion Cation
F Cl NO2 Br NO3 SO4 PO4 Li Na NH4 K Mg Ca
PESD ND 2.0 ND ND ND ND ND ND ND 10.0 ND ND ND

PE Cushion

(Competitor A)

ND 12 ND ND 3 2 ND ND 7 ND 4 ND 3

PU Cushion

(Competitor B)

ND 28 54 ND 5 4 1 ND 10 2 760 4 18

*This data is an actual measurement value, not a guaranteed value

Outgassing comparison

Sample Total outgassing BHT
8PESD 0.08 ND

PE Cushion

(Competitor A)

0.23 ND

PU Cushion

(Competitor B)

0.32 ND

*This data is an actual measurement value, not a guaranteed value

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