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PRODUCTS
Wafer Handling System
Interleaf: Conductive Type/CPS(Z2)
Conductive film spacer/interleaf/separator
Achilles’ unique compounding technology gives the spacer the performance of ESD protection, low particles, and low ion contamination. Embossing prevents adhesion to the wafer. Both sides can be used.
Pick-up with a vacuum pad is also possible.
Pick-up with a vacuum pad is also possible.
Features
- Static antistatic performance
- Low particle level
- Low ion contamination
- Both sides of spacer have the same surface pattern
Specification
- Model number：
- CPS-□-350（Z2）（□：diameter）
- Material：
- Conductive PE
- Surface resistance value：
- R < 1.0×109Ω
- Emboss Thickness：
- 350μｍ
Physical property
| Item | measured value |
|---|---|
| Resistance（23℃ 60%RH) | 2.3×105 Ω |
| Charging potential | 0-1 V |
| Decay time (1kV→100V) |
<0.1 sec |
| Particle APC(0.5um<) | 26 counts/pc |
| Ion contamination 【anion】(ppb) | Cl：ND NO3：ND SO4：ND |
| Ion contamination 【cation】(ppb) | Na：ND K：ND |
*This data is an actual measurement value, not a guaranteed value
Resistance comparison
| Sample | Measurement environment | |||
|---|---|---|---|---|
| 23℃×15%RH | 23℃×30%RH | 23℃×60%RH | 23℃×95%RH | |
| CPS(Z2) | 2.3×105 | 2.3×105 | 2.3×105 | 2.3×105 |
|
Dust-free paper (Competitor A) |
1.0×1013 | 3.2×1011 | 3.8×109 | 3.4×106 |
|
Woven fabric (Competitor B) |
1.0××1013< | 1.0××1013< | 1.0××1013< | 1.0××1013< |
*This data is an actual measurement value, not a guaranteed value
Triboelectric charging voltage, decay time comparison
| Sample | Triboelectric charging voltage(V) | Decay Time （sec.） | |
|---|---|---|---|
| +1kv→+100V | -1kv→-100V | ||
| CPS(Z2) | 0-1 | <0.1 | <0.1 |
|
Dust-free paper (Competitor A) |
2000< | 12-100< | 10-100< |
|
Woven fabric (Competitor B) |
2000< | 100< | 100< |
*This data is an actual measurement value, not a guaranteed value
Particle comparison APC
| Sample (size. 8inch) |
0.3um≦ | 0.5um≦ | 1um≦ | 3um≦ | 5um≦ | 10um≦ | 30um≦ | 50um≦ |
|---|---|---|---|---|---|---|---|---|
| CPS(Z2) | 32.6 | 25.9 | 11.4 | 6.1 | 5.9 | 2.8 | 0.4 | 0.2 |
|
Dust-free paper (Competitor A) |
507.7 | 328.3 | 181.3 | 93.7 | 81,7 | 41.0 | 4.0 | 1.8 |
|
Woven fabric (Competitor B) |
204.0 | 128.3 | 68.0 | 28.7 | 21.7 | 6.3 | 2.7 | 1.4 |
*This data is an actual measurement value, not a guaranteed value
Ion contamination comparison
| Sample | Anion | Cation | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
| CPS(Z2) | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND |
|
Dust-free paper (Competitor A) |
ND | 540 | ND | ND | 52 | 830 | 4 | ND | 300 | ND | 970 | ND | ND |
|
Woven fabric (Competitor B) |
ND | 2 | ND | ND | 1 | ND | ND | ND | ND | 1 | ND | ND | ND |
*This data is an actual measurement value, not a guaranteed value
Outgassing comparison
| Sample | Total outgassing | BHT |
|---|---|---|
| CPS(Z2) | 0.080 | ND |
|
Dust-free paper (Competitor A) |
0.005 | 0.0003 |
|
Woven fabric (Competitor B) |
0.142 | ND |
*This data is an actual measurement value, not a guaranteed value
