![ACHILLES CORPORATION [Achilles]](/asset/images/common/logo-achilles_en.svg){kind=logo}
PRODUCTS
Wafer Spacer
Conductive Interleaf
CPS-□-350(Z2)
Conductive film spacer/interleaf/separator
ESD-protected, low-particle, low ion contamination with Achilles’ original material formulation. The corrugated surface design suppresses sticking to wafers and compatible with automated machines.
Features
- ESD protected
- Low particle level
- Low ion contamination
- Double-side embossing
Specifications
- Model number：
- CPS-□-350(Z2) *□：diameter
- Material：
- Conductive PE
- Surface resistance value：
-
- 1.0×105Ω < R < 1.0×109Ω
- Emboss Thickness：
- 350μm
Physical properties
| Item | measured value |
|---|---|
| Resistance（23℃, 60%RH) | 2.3×105 Ω |
| Charging potential | 0-1 V |
| Decay time (1kV→100V) |
<0.1 sec |
| Particle APC(0.5um<) | 26 counts/pc |
| Ion contamination 【anion】(ppb) | Cl：ND NO3：ND SO4：ND |
| Ion contamination 【cation】(ppb) | Na：ND K：ND |
*This data is an actual measurement value, not a guaranteed value
Resistance comparison
| Sample | Measurement environment | |||
|---|---|---|---|---|
| 23℃×15%RH | 23℃×30%RH | 23℃×60%RH | 23℃×95%RH | |
| CPS(Z2) | 2.3×105 | 2.3×105 | 2.3×105 | 2.3×105 |
|
Dust-free paper (Competitor A) |
1.0×1013 | 3.2×1011 | 3.8×109 | 3.4×106 |
|
Woven fabric (Competitor B) |
1.0××1013< | 1.0××1013< | 1.0××1013< | 1.0××1013< |
*This data is an actual measurement value, not a guaranteed value
Triboelectric charging voltage, decay time comparison
| Sample | Triboelectric charging voltage(V) | Decay Time （sec.） | |
|---|---|---|---|
| +1kv→+100V | -1kv→-100V | ||
| CPS(Z2) | 0-1 | <0.1 | <0.1 |
|
Dust-free paper (Competitor A) |
2000< | 12-100< | 10-100< |
|
Woven fabric (Competitor B) |
2000< | 100< | 100< |
*This data is an actual measurement value, not a guaranteed value
Particle comparison APC
| Sample (size. 8inch) |
0.3um≦ | 0.5um≦ | 1um≦ | 3um≦ | 5um≦ | 10um≦ | 30um≦ | 50um≦ |
|---|---|---|---|---|---|---|---|---|
| CPS(Z2) | 32.6 | 25.9 | 11.4 | 6.1 | 5.9 | 2.8 | 0.4 | 0.2 |
|
Dust-free paper (Competitor A) |
507.7 | 328.3 | 181.3 | 93.7 | 81,7 | 41.0 | 4.0 | 1.8 |
|
Woven fabric (Competitor B) |
204.0 | 128.3 | 68.0 | 28.7 | 21.7 | 6.3 | 2.7 | 1.4 |
*This data is an actual measurement value, not a guaranteed value
Ion contamination comparison
| Sample | Anion | Cation | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
| CPS(Z2) | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND | ND |
|
Dust-free paper (Competitor A) |
ND | 540 | ND | ND | 52 | 830 | 4 | ND | 300 | ND | 970 | ND | ND |
|
Woven fabric (Competitor B) |
ND | 2 | ND | ND | 1 | ND | ND | ND | ND | 1 | ND | ND | ND |
*This data is an actual measurement value, not a guaranteed value
Outgassing comparison
| Sample | Total outgassing | BHT |
|---|---|---|
| CPS(Z2) | 0.080 | ND |
|
Dust-free paper (Competitor A) |
0.005 | 0.0003 |
|
Woven fabric (Competitor B) |
0.142 | ND |
*This data is an actual measurement value, not a guaranteed value
