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Wafer Handling System

Interleaf: Anti-Static Type/PEA(Z1)
Antistatic film spacer/interleaf/separator

Achilles’ unique compounding technology gives the spacer the performance of ESD protection, low particles, and low ion contamination. Embossing prevents adhesion to the wafer. Both sides can be used.
Pick-up with a vacuum pad is also possible.

Features

  • Static antistatic performance
  • Low particle level
  • Low ion contamination
  • Both sides of spacer have the same surface pattern

Specification

Model number
PEA-□-350(Z1)(□:diameter)
Material
Conductive PE
Surface resistance value
R < 1.0×1011Ω
Emboss Thickness
350μm

Physical property

Item Data
Resistance(23℃ 60%RH) 2.0×10^9 Ω
Charging potential 7-12 V
Decay time
(1kV→100V)
8-13 sec
Particle APC(0.5um<) 24 counts/pc
Outgassing 0.22 mg/g
Ion contamination 【anion】(ppb) Cl:3
NO3:1
SO4:ND
Ion contamination 【cation】(ppb) Na:1
K:260

*This data is an actual measurement value, not a guaranteed value.

Resistance comparison

Sample Measurement environment
23℃×15%RH 23℃×30%RH 23℃×60%RH 23℃×95%RH
PEA(Z1) 9.2E+10 7.7E+10 2.0E+9 9.3E+8

Dust-free paper

(Competitor A)

1.0E+13< 3.2E+11 3.8E+9 3.4E+6

Woven fabric

(Competitor B)

1.0E+13< 1.0E+13< 1.0E+13< 1.0E+13<

*This data is an actual measurement value, not a guaranteed value

Triboelectric charging voltage, decay time comparison

Sample Triboelectric charging voltage (V) Decay Time (sec)
+1kv→+100V -1kv→-100V
PEA(Z1) 7-12 8-12 8-13

Dust-free paper

(Competitor A)

2000< 12-100< 10-100<

Woven fabric

(Competitor B)

2000< 100< 100<

*This data is an actual measurement value, not a guaranteed value

Particle comparison APC

Sample
(size. 8inch)
0.3um≦ 0.5um≦ 1um≦ 3um≦ 5um≦ 10um≦ 30um≦ 50um≦
PEA(Z1) 31.0 23.8 10.6 5.6 5.4 2.6 0.4 0.2

Dust-free paper

(Competitor A)

507.7 328.3 181.3 93.7 81,7 41.0 4.0 1.8

Woven fabric

(Competitor B)

204.0 128.3 68.0 28.7 21.7 6.3 2.7 1.4

*This data is an actual measurement value, not a guaranteed value

Ion contamination comparison

Sample Anion Cation
F Cl NO2 Br NO3 SO4 PO4 Li Na NH4 K Mg Ca
PEA(Z1) ND 3 ND ND 1 ND ND ND 1 ND 260 ND ND

Dust-free paper

(Competitor A)

ND 540 ND ND 52 830 4 ND 300 ND 970 ND ND

Woven fabric

(Competitor B)

ND 2 ND ND 1 ND ND ND ND 1 ND ND ND

*This data is an actual measurement value, not a guaranteed value

Outgassing comparison

Sample Total outgassing BHT
PEA(Z1) 0.220 ND

Dust-free paper

(Competitor A)

0.005 0.0003

Woven fabric

(Competitor B)

0.142 ND

*This data is an actual measurement value, not a guaranteed value

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