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PRODUCTS
Wafer Spacer
Anti-Static Interleaf
PEA-□-350(Z1)
Antistatic film spacer/interleaf/separator
ESD-protected, low-particle, low ion contamination with Achilles’ original material formulation. The corrugated surface design suppresses sticking to wafers and compatible with automated machines.
Features
- ESD protected
- Low particle level
- Low ion contamination
- Double-side embossing
Specifications
- Model number：
- PEA-□-350（Z1）（□：diameter）
- Material：
- Conductive PE
- Surface resistance value：
- R < 1.0×1011Ω
- Emboss Thickness：
- 350μｍ
Physical properties
| Item | Data |
|---|---|
| Resistance（23℃ 60%RH) | 2.0×10^9 Ω |
| Charging potential | 7-12 V |
| Decay time (1kV→100V) |
8-13 sec |
| Particle APC(0.5um<) | 24 counts/pc |
| Outgassing | 0.22 mg/g |
| Ion contamination 【anion】(ppb) | Cl：3 NO3：1 SO4：ND |
| Ion contamination 【cation】(ppb) | Na：1 K：260 |
*This data is an actual measurement value, not a guaranteed value.
Resistance comparison
| Sample | Measurement environment | |||
|---|---|---|---|---|
| 23℃×15%RH | 23℃×30%RH | 23℃×60%RH | 23℃×95%RH | |
| PEA(Z1) | 9.2E+10 | 7.7E+10 | 2.0E+9 | 9.3E+8 |
|
Dust-free paper (Competitor A) |
1.0E+13< | 3.2E+11 | 3.8E+9 | 3.4E+6 |
|
Woven fabric (Competitor B) |
1.0E+13< | 1.0E+13< | 1.0E+13< | 1.0E+13< |
*This data is an actual measurement value, not a guaranteed value
Triboelectric charging voltage, decay time comparison
| Sample | Triboelectric charging voltage (V) | Decay Time （sec） | |
|---|---|---|---|
| +1kv→+100V | -1kv→-100V | ||
| PEA(Z1) | 7-12 | 8-12 | 8-13 |
|
Dust-free paper (Competitor A) |
2000< | 12-100< | 10-100< |
|
Woven fabric (Competitor B) |
2000< | 100< | 100< |
*This data is an actual measurement value, not a guaranteed value
Particle comparison APC
| Sample (size. 8inch) |
0.3um≦ | 0.5um≦ | 1um≦ | 3um≦ | 5um≦ | 10um≦ | 30um≦ | 50um≦ |
|---|---|---|---|---|---|---|---|---|
| PEA(Z1) | 31.0 | 23.8 | 10.6 | 5.6 | 5.4 | 2.6 | 0.4 | 0.2 |
|
Dust-free paper (Competitor A) |
507.7 | 328.3 | 181.3 | 93.7 | 81,7 | 41.0 | 4.0 | 1.8 |
|
Woven fabric (Competitor B) |
204.0 | 128.3 | 68.0 | 28.7 | 21.7 | 6.3 | 2.7 | 1.4 |
*This data is an actual measurement value, not a guaranteed value
Ion contamination comparison
| Sample | Anion | Cation | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
| PEA(Z1) | ND | 3 | ND | ND | 1 | ND | ND | ND | 1 | ND | 260 | ND | ND |
|
Dust-free paper (Competitor A) |
ND | 540 | ND | ND | 52 | 830 | 4 | ND | 300 | ND | 970 | ND | ND |
|
Woven fabric (Competitor B) |
ND | 2 | ND | ND | 1 | ND | ND | ND | ND | 1 | ND | ND | ND |
*This data is an actual measurement value, not a guaranteed value
Outgassing comparison
| Sample | Total outgassing | BHT |
|---|---|---|
| PEA(Z1) | 0.220 | ND |
|
Dust-free paper (Competitor A) |
0.005 | 0.0003 |
|
Woven fabric (Competitor B) |
0.142 | ND |
*This data is an actual measurement value, not a guaranteed value
