ACHILLES CORPORATION [Achilles]

 

PRODUCTS

Wafer Handling System

Pink Inner foam: Antistatic Type/PEAS
Antistatic multi-layer foam

 

PEAS Cushion is a low dust generating cushion material made by laminating an antistatic film on the front and back surfaces of a closed-cell foam. This structure reduces the exposure of the foam surfaces.

Features

  • Stable antistatic performance
  • Cleanliness(independent foaming/Surface film lamination)
  • Good impact absorption
  • Low particle level

Specification

Model number
MA-□PEAS-1/3/5/6/10(□:diameter)(1/3/5/6/10:thickness)
Material
Antistatic PE
Surface resistance value
R < 1.0×1011Ω

Physical property 

Item measured value
Resistance(23℃ 60%RH 2.8×109 Ω
Charging potential 0-7 V
Decay time
(5kV→0V)
0.01-0.02 sec
Particle APC(0.5um<) 24 counts/pc
Outgassing 0.22 mg/g
Ion contamination 【anion】(ppb) Cl:3
NO3:1
SO4:ND
Ion contamination 【cation】(ppb) Na:1
K:260

*This data is an actual measurement value, not a guaranteed value

Resistance comparison

Sample Measurement environment
23℃×60%RH
PEAS 6.0×109

PE Cushion

(Competitor A)

2.7×1010

PU Cushion

(Competitor B)

4.8×109

*This data is an actual measurement value, not a guaranteed value

Triboelectric charging voltage, decay time comparison

Sample Triboelectric charging voltage(V) Decay Time (sec.)
+5kv→+0V -5kv→-0V
PEAS 2-5 0.01 – 0.02 0.01 – 0.02

PE Cushion

(Competitor A)

2 – 5 0.19-0.22 0.19-0.22

PU Cushion

(Competitor B)

5 – 7 0.21-0.24 0.21-0.24

*This data is an actual measurement value, not a guaranteed value

Particle comparison APC

Sample(size. 8inch)
(thickness 5mm)
0.3um≦ 0.5um≦ 1um≦ 3um≦ 5um≦ 10um≦
PEAS 175 76 36 16 13 4

PE Cushion

(Competitor A)

1,111 786 496 257 189 69

PU Cushion

(Competitor B)

67,959 49,003 28,445 14,533 10,999 3,357

*This data is an actual measurement value, not a guaranteed value

Ion contamination comparison

Sample Anion Cation
F Cl NO2 Br NO3 SO4 PO4 Li Na NH4 K Mg Ca
PEAS  ND 1.3 ND ND ND 1.4 ND ND ND 2.8 112.3 ND ND

PE Cushion

(Competitor A)

ND 12 ND ND 3 2 ND ND 7 ND 4 ND 3

PU Cushion

(Competitor B)

ND 28 54 ND 5 4 1 ND 10 2 760 4 18

*This data is an actual measurement value, not a guaranteed value

Outgassing comparison

Sample Total outgassing BHT
PEAS  0.24 ND

PE Cushion

(Competitor A)

0.23 ND

PU Cushion

(Competitor B)

0.32 ND

*This data is an actual measurement value, not a guaranteed value

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