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PRODUCTS
Wafer Handling System
Pink Inner foam: Antistatic Type/PEAS
Antistatic multi-layer foam
Low dust generating cushion of antistatic grade. Made from closed-cell foam and laminated the surfaces.
To prevent wafer shaking inside the case, this cushion fills the space and holds the wafer in place.
To prevent wafer shaking inside the case, this cushion fills the space and holds the wafer in place.
Features
- Stable antistatic performance
- Cleanliness(independent foaming/Surface film lamination)
- Good impact absorption
- Low particle level
Specification
- Model number：
- MA-□PEAS-1/3/5/6/10（□：diameter）(1/3/5/6/10：thickness)
- Material：
- Antistatic PE
- Surface resistance value：
- R < 1.0×1011Ω
Physical property
| Item | measured value |
|---|---|
| Resistance（23℃ 60%RH | 2.8×109 Ω |
| Charging potential | 0-7 V |
| Decay time (5kV→0V) |
0.01-0.02 sec |
| Particle APC(0.5um<) | 24 counts/pc |
| Outgassing | 0.22 mg/g |
| Ion contamination 【anion】(ppb) | Cl：3 NO3：1 SO4：ND |
| Ion contamination 【cation】(ppb) | Na：1 K：260 |
*This data is an actual measurement value, not a guaranteed value
Resistance comparison
| Sample | Measurement environment |
|---|---|
| 23℃×60%RH | |
| PEAS | 6.0×109 |
|
PE Cushion (Competitor A) |
2.7×1010 |
|
PU Cushion (Competitor B) |
4.8×109 |
*This data is an actual measurement value, not a guaranteed value
Triboelectric charging voltage, decay time comparison
| Sample | Triboelectric charging voltage(V) | Decay Time （sec.） | |
|---|---|---|---|
| +5kv→+0V | -5kv→-0V | ||
| PEAS | 2-5 | 0.01 – 0.02 | 0.01 – 0.02 |
|
PE Cushion (Competitor A) |
2 – 5 | 0.19-0.22 | 0.19-0.22 |
|
PU Cushion (Competitor B) |
5 – 7 | 0.21-0.24 | 0.21-0.24 |
*This data is an actual measurement value, not a guaranteed value
Particle comparison APC
| Sample(size. 8inch) (thickness 5mm) |
0.3um≦ | 0.5um≦ | 1um≦ | 3um≦ | 5um≦ | 10um≦ |
|---|---|---|---|---|---|---|
| PEAS | 175 | 76 | 36 | 16 | 13 | 4 |
|
PE Cushion (Competitor A) |
1,111 | 786 | 496 | 257 | 189 | 69 |
|
PU Cushion (Competitor B) |
67,959 | 49,003 | 28,445 | 14,533 | 10,999 | 3,357 |
*This data is an actual measurement value, not a guaranteed value
Ion contamination comparison
| Sample | Anion | Cation | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | Li | Na | NH4 | K | Mg | Ca | |
| PEAS | ND | 1.3 | ND | ND | ND | 1.4 | ND | ND | ND | 2.8 | 112.3 | ND | ND |
|
PE Cushion (Competitor A) |
ND | 12 | ND | ND | 3 | 2 | ND | ND | 7 | ND | 4 | ND | 3 |
|
PU Cushion (Competitor B) |
ND | 28 | 54 | ND | 5 | 4 | 1 | ND | 10 | 2 | 760 | 4 | 18 |
*This data is an actual measurement value, not a guaranteed value
Outgassing comparison
| Sample | Total outgassing | BHT |
|---|---|---|
| PEAS | 0.24 | ND |
|
PE Cushion (Competitor A) |
0.23 | ND |
|
PU Cushion (Competitor B) |
0.32 | ND |
*This data is an actual measurement value, not a guaranteed value
