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PRODUCTS
Wafer Handling System
150mm Horizontal Wafer Shipper (6inch)
Protos Carrier MA-6S
Horizontal Wafer Shipper (ESD Supported)
Achilles’ Wafer Package System can transfer your wafers both safely and efficiently. Based on our proven technology nurtured by years of experience, this wafer package system can transfer such highly fragile wafers as thin wafers for TSV chips and compound wafers.
Features
- For 150mm wafers. Maximum storage capacity of 25 wafers.
- Made from low particles/ionic/outgassing material
- ESD safe / Conforms to ANSI / ESD S541.
- Damage during transportation is reduced by double wall instruction
- Compatible with automatic wafer packing equipment.
Specification
- Model number：
- MA-6S
- Material：
- Container Body PP／（Polypropylene） carbon included,
- Surface resistance value：
- R < 10^6 Ω
- Wafer storage diameter：
- 153±1mm
- Height of storage：
- 38.0mm
- product size：
- 63mm × 175mm × 175mm 0.34kg
- Carton size (10pcs/carton)：
- 370mm × 320mm × 220mm 4.2kg
Options
- Insert /Interleaf
- Pink or black inner foam
- Moisture barrier bags
Recommended combination
| For Memory | For Logic | For Compound Wafer | ||
|---|---|---|---|---|
| cushion | MA-6PEAS-□※1 | ◯ | ||
| MA-6PESD-■※2 | ◯ | ◯ | ||
| interleaf | PEA-6-350(Z1) | ◯ | ||
| CPS-6-350(Z2) | ◯ | ◯ | ◯ | |
| Inner tray | VFS-6-8R-65A | ◯ | ◯ | ◯ |
※1 □：1/3/5/6/10
※2 ■：1/3/5/10
PEAS,PEA : Antistatic Type
PESD,CPS : Conductive Type
How to store
6inch = 150mm wafer / 25 wafers can be stored
【Example ：100μｍT wafer】
※Inner foam thickness changes depending on the thickness of the wafer.
※This package example does not guarantee that the wafer will not crack.
How to close
①Align the edges
(Yellow line in the figure)
②Turn counterclockwise until TOP falls naturally
③Turn right TOP
④Twist lock finish
Cushion stacking guideline
Cushion stacking guideline
＊ Mark: line
